Interference lithography (or holographic lithography) is a technique that uses coherent light (such as light from a laser) for patterning regular arrays of fine features without the use of complex …

In this review the basic principles of interference lithography (IL) are described. IL is emerging as one of the most powerful yet relatively inexpensive methodologies for creating large-area …

Oct 14, 2024 · This review discusses the latest advancements in grating manufacturing techniques, particularly highlighting laser interference lithography, which excels in sub-beam …

Interference lithography (IL) is the preferred method for fabricating periodic and quasi-periodic patterns that must be spatially coherent over large areas. IL is a con-ceptually simple process …

Our laser interference lithography can create high visibility interference fringe by accurate wavefront. Our high precision work stage realizes fine interference lithography. The right figure …

Laser interference lithography is a technique that takes advantage of the periodicity of the interference pattern between two or more light (laser) waves, using this as a way to expose a …

A systematic review, covering fabrication of nanoscale patterns by laser interference lithography (LIL) and their applications for optical devices are provided. LIL is a patterning method with …

In interference lithography, the beam of an argon laser is widened, divided and brought to interference by superposition. By positioning a photosensitive sample in this interference …

Laser interference lithography is a maskless lithography technique for creating periodic grating structures using two interfering laser beams. We use laser interference lithography and UV …

Our fast-reconfigurable large-area interference lithography nanopatterning system can create sub-50 nm structures over a wafer-scale area with cost and processing time only one tenth of the …